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Robust Micromachined Silicon Carbide Environmental Sensors--Boston MicroSystems, Inc., 356 Walnut Street, Wellesley, MA 02181-3324; 617-661-6075
Dr. Richard Mlcak, Principal Investigator
Dr. Richard Mlcak, Business Official
DOE Grant No. DE-FG02-98ER82541
Amount: $749,497
Foul-resistant sensors are needed to operate in the elevated temperatures and chemically aggressive environments characteristic of smokestacks and combustion exhausts. The sensors must exhibit high sensitivity, selectivity to key emission constituents, and rapid response. In addition, the remote placement and monitoring of sensors requires low power drain and reasonable cost. This project will develop a micromachined, single-crystal, silicon carbide sensor that is both versatile and robust. The proposed sensor, consisting of a p-n junction active sensor element and an integrated micro-hotplate, will be capable of operating in corrosive environments at elevated temperatures and will meet all of the above requirements. In Phase I, the feasibility of the sensor was demonstrated by using a photoelectrochemical micromachining process to fabricate single-crystal SiC micro-hotplates and single-crystal SiC p-n junction active sensor elements. The sensor performed successfully in controlled, gaseous environments representative of combustion exhausts. Phase II will integrate the hotplate, p-n junction gas sensor element, on-chip temperature sensor, and associated electronics into a vigorous, fully-functional gas sensor which will then be optimized for gas sensitivity, reproducibility, and useful life.
Commercial Applications and other Benefits as described by the awardee: These sensors should be useful in the monitoring, controlling, and tracking of smoke-stack and combustion exhaust emissions, essential for insuring compliance with clean air regulations. They could also be used for monitoring the geographic dispersal of emissions in varying climatic conditions.