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SiCN
High Temperature MEMS Sensor Suite--Sporian
Microsystems, Inc., 4699 Nautilus Court South, Suite #201, Boulder, CO
80301; 303-516-9075, www.sporian.com
Mr.
Wenge Zhang, Principal Investigator, wenge@sporian.com
Mr.
Bill K Garrett, Business Official, bill@sporian.com
DOE
Grant No. DE-FG02-03ER83782
Amount:
$749,973
To improve performance and efficiency, reduce pollution, and achieve
optimal control of power generation systems (such as turbines, fuel cells,
gasification systems, and advanced combustion systems) robust sensing systems
are needed to monitor parameters such as pressure and temperature in
situ in harsh environments. SiC-
and Si3N4-based MEMS sensors are among the few types of
sensors that can be utilized for the direct measurement of pressure and
temperature distributions in the combustion chamber of turbine engines or other
high temperature environments. Unfortunately,
the maximum working temperatures of these technologies is not high enough for
many applications. This project will
develop a temperature and pressure sensor that will be useful for energy
generation applications to 1400ºC, with excursions to 1500ºC. Phase
I established the feasibility of using SiCN for the application, through
detailed design analysis, material property measurements, and experimental
validation. Potential end users for
the application were involved throughout the project to help guide the design
toward commercial applications. Phase
II will develop a prototype sensor. This
will include fabricating prototype sensors, improving and verifying the
performance of the SiCN-based materials, and testing and evaluating the
prototypes.
Commercial
Applications and Other Benefits as
described by awardee: The
new sensor should allow turbine operators and other energy generation equipment
operators to monitor the conditions of equipment in sections that operate at
elevated temperatures. Significant
market opportunities include the land-based gas turbine industry and the
propulsion or aero gas turbine industry.