Advanced Fuel Research, Inc.
87 Church Street
East Hartford, CT 06108

James Markham, CEO
860-528-9806 ext. 104
jim@AFRinc.com
www.AFRinc.com

   
Project Title: Fourier Transform Infrared Products

DOE SBIR/STTR Project ID#(s): 06323, 10109, 03624, 26094

Technology: Fourier transform infrared (FT-IR) spectrometry is an optical technique that provides for measurements of chemical components and thermal radiative properties of materials.  A rugged, low-cost, portable and reliable Fourier transform infrared (FT-IR) interferometer was developed that became a core component in new advanced products that are now manufactured and marketed for gas analysis and surface analysis.  The DOE SBIR program has resulted in advancing a technology that was once only suitable for use in pristine laboratory conditions to the factory floor and other workforce environments.

Benefits: Based on the developed FT-IR technology, new products were produced for the semiconductor industry. Wafer and thin-film metrology products allow semiconductor and optoelectronics manufacturers to optimize device performance, yield and manufacturing productivity by providing rapid feedback on semiconductor and thin-film properties such as composition, doping concentration and thickness. Gas analysis products allow semiconductor manufacturers and capital equipment makers to maximize their productivity and environmental compliance by providing fast and accurate composition data on the gas streams used in advanced manufacturing processes.  The gas analysis products have also expanded into other industrial markets.

Applications include:

• Semiconductor industry – high speed film thickness measurement and mapping for both manufacturers and users of epi wafers, facilitating precise uniformity verification on a full production basis.
• Semiconductor industry – advanced film analysis to enhance process control and improve yields of silicon microelectronics and compound semiconductor devices such as Avalanche photodetectors, diodes, infrared lasers, and blue lasers.
• Semiconductor and other industries – continuous quantitative multiple gas analysis including stack monitoring (environmental compliance); process monitoring, development and optimization; ambient air analysis (industrial hygiene); bulk gas purity analysis; combustion emissions monitoring for boilers and turbine engines; selective catalytic reduction performance monitoring; catalyst research and development; and fuel cell development.

Benefit to the Company:  The DOE SBIR program has had a tremendous impact on Advanced Fuel Research, Inc. (AFR). The technology advancements, patents, and developed expertise resulted in the creation of a venture capitalized spin-off company, On-Line Technologies, Inc., which completed the development of products and brought them to production status. The opening of a product manufacturing floor in East Hartford, CT, and a second sales office in Palo Alto, California resulted in product sales totaling over $12 million. During the growth of the spin-off company, AFR faced the continuous challenge of the transfer of key employees to concentrate on the commercial focus. The spin-off grew to 39 employees while AFR dropped to 15. Then on April 27, 2001, the spin-off company was purchased by MKS Instruments, Inc. (NASDAQ: MKSI) for $22.9 million, which was paid in cash and stock to the shareholders. The acquisition provides the resources to continue development of FT-IR products with access to worldwide sales, distribution, and services. The sales growth and the successful merger is a true SBIR success story. Throughout this commercialization effort, AFR has stayed healthy and growing as a small business R&D firm. AFR thanks the DOE SBIR for support that has resulted in both technical and commercial success.